Raman, Dynamics of tapping mode atomic force microscopy in liquids: theory and experiments. Horng, Analyses of vibration responses on nanoscale processing in a liquid using tapping-mode atomic force microscopy. Massie, Tapping mode atomic force microscopy in liquids. Greve, Tapping mode atomic force microscopy in liquid. Finally, the effect of MC’s angle on surface topography and time response of the system was investigated.Ĭ.A. In liquid medium, MC is installed at an oblique position to avoid damaging the MC due to the squeezed-film force in the vicinity of MC surface. Also, the effect of geometric dimensions on the surface topography was investigated. Various types of surface roughness were considered in the topography for MC different geometries. The surface topography of MCs different geometries were compared in the liquid medium and the comparison was done in both tapping and non-contact mode. The frequencies and time responses of MC close to the surface were obtained considering tip-sample forces. The effect of fluid density and viscosity on the MC vibrations that immersed in different glycerin solutions was investigated in 2D and 3D modes and the results were compared with the experimental results. The effect of this force along with the squeezed-film force was considered on MC equations. In this mode, the hydrodynamic force was assumed with a string of spheres. In 2D modeling by applying Hamilton’s Principle based on Euler–Bernoulli Beam theory, the governing motion equation was derived and discretized with FEM. The 3D simulation was done in a spherical container using FSI domain in COMSOL. The present study aims to simulate different geometries of the four-layered AFM piezoelectric MCs in 2D and 3D modeling in a liquid medium using COMSOL software. To this end, one of the appropriate methods to simulate the dynamic behavior of microcantilever (MC) is a numerical solution with FEM in the 3D modeling using COMSOL software. The analysis of piezoelectric microcantilevers vibration behavior is essential to improve the AFM performance. The surface topography in nanoscale is one of the most important applications of AFM.
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